Low frequency noise characteristics of resistor- and Si...

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Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer

Shin, Wonjun, Jung, Gyuweon, Hong, Seongbin, Jeong, Yujeong, Park, Jinwoo, Jang, Dongkyu, Park, Byung-Gook, Lee, Jong-Ho
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Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2020.128087
Date:
April, 2020
File:
PDF, 2.80 MB
2020
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