![](/img/cover-not-exists.png)
Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer
Shin, Wonjun, Jung, Gyuweon, Hong, Seongbin, Jeong, Yujeong, Park, Jinwoo, Jang, Dongkyu, Park, Byung-Gook, Lee, Jong-HoJournal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2020.128087
Date:
April, 2020
File:
PDF, 2.80 MB
2020