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Influence of sputtering conditions on the properties of aluminum-doped zinc oxide thin film fabricated using a facing target sputtering system
Lee, Moonyoung, Park, Yongseo, Kim, Kyunghwan, Hong, JeongsooVolume:
703
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.137980
Date:
June, 2020
File:
PDF, 3.51 MB
2020