The modeling design integral the electrostatic microelectromechanical switch of capacitive type
Lysenko, Igor E., Tkachenko, Alexey V., Ezhova, Olga A., Konoplev, Boris G., Yermolov, P.Volume:
30
Year:
2019
Journal:
ITM Web of Conferences
DOI:
10.1051/itmconf/20193006005
File:
PDF, 1.94 MB
2019