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Effects of aspect ratio on electron loss mechanisms and plasma uniformity in cylindrical inductively coupled plasma
Hao, Zeyu, Hua, Yue, Song, Jian, Ren, ChunshengVolume:
27
Journal:
Physics of Plasmas
DOI:
10.1063/1.5143099
Date:
April, 2020
File:
PDF, 2.50 MB
2020