[IEEE 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Grenoble, France (2019.4.1-2019.4.3)] 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - The effect of a damaged surface layer on the conductivity of Si nanowires made by direct plasma etching on SOI wafer
Miakonkikh, Andrey, Rudenko, Konstantin, Rogozhin, Alexander, Tatarintsev, AndreyYear:
2019
DOI:
10.1109/eurosoi-ulis45800.2019.9041909
File:
PDF, 1.16 MB
2019