[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Biointegrated Subtractive Microfabrication by Hydrodynamic Flow Confinement
Widerker, Daniel, Paratore, Federico, Kaigala, Govind, Bercovici, MoranYear:
2020
DOI:
10.1109/mems46641.2020.9056368
File:
PDF, 1.42 MB
2020