Synthesis and integration of thin film solid state...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 05 Vol. 38; Iss. 3

Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries

Sheil, Ryan, Chang, Jane P.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5142859
Date:
May, 2020
File:
PDF, 5.00 MB
2020
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