Hybrid Effect Study of Pad-Conditioning/Slurry-Supply by High-Pressure-Micro-Jet (HPMJ) Method during CMP Process
Wang, Chengwu, Doi, Toshiro, Miyachi, Keiji, Tsukamoto, Keiichi, Miyashita, Tadakazu, Kurokawa, Syuhei, Fan, Li, Zhang, Yu, Hang, WeiVolume:
9
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab7a0d
Date:
March, 2020
File:
PDF, 1.42 MB
2020