Synergistic Action Mechanism and Effect of Ammonium Dodecyl...

ECS Journal of Solid State Science and Technology 2020 / 04 Vol. 9; Iss. 3

Synergistic Action Mechanism and Effect of Ammonium Dodecyl Sulfate and 1,2,4-triazole in Alkaline Slurry on Step Height Reduction for Cu CMP

Yang, Chenghui, Niu, Xinhuan, Zhou, Jiakai, Wang, Jianchao, Huo, Zhaoqing, Lu, Yanan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2162-8777/ab80b3
Date:
April, 2020
File:
PDF, 2.39 MB
2020
Conversion to is in progress
Conversion to is failed