Development of the LIGA Process using a Superconducting Compact Synchrotron Light Source
Takada, Hiroshi, Hirata, Yoshihiro, Okuyama, Hiroshi, Numazawa, ToshiyukiVolume:
116
Year:
1996
Journal:
IEEJ Transactions on Electronics, Information and Systems
DOI:
10.1541/ieejeiss1987.116.12_1334
File:
PDF, 3.84 MB
1996