Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO 4 solution as an absorber
Chang, Hui-Fang, Yeung, Wing Kiu, Kao, Wei-Chen, Ehrhardt, Martin, Zimmer, Klaus, Cheng, Ji-YenVolume:
32
Journal:
Journal of Laser Applications
DOI:
10.2351/1.5114659
Date:
May, 2020
File:
PDF, 1.60 MB
2020