Evaluation of Characteristics of a Tantalum-Nitride Thin Film Resistor on an AlN Submount.
AKASHI, Teruhisa, TAKEMORI, Hideaki, TOMOBE, Tetsuya, KOIZUMI, ToshiakiVolume:
68
Year:
2002
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.68.1052
File:
PDF, 1.92 MB
2002