Development of nanometer level accurate computer-controlled...

Development of nanometer level accurate computer-controlled figuring with high spatial resolution and its application to hard X-ray focusing mirror

MIMURA, Hidekazu, YUMOTO, Hirokatsu, MATSUYAMA, Satoshi, SANO, Yasuhisa, YAMAUCHI, Kazuto
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Volume:
76
Year:
2010
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.76.338
File:
PDF, 1.27 MB
2010
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