![](/img/cover-not-exists.png)
Development of nanometer level accurate computer-controlled figuring with high spatial resolution and its application to hard X-ray focusing mirror
MIMURA, Hidekazu, YUMOTO, Hirokatsu, MATSUYAMA, Satoshi, SANO, Yasuhisa, YAMAUCHI, KazutoVolume:
76
Year:
2010
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.76.338
File:
PDF, 1.27 MB
2010