A New Non-Invasive Air-Based Actuator for Characterizing...

Actuators 2020 / 03 Vol. 9; Iss. 2

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

Panahi, Abbas, Hossein Sabour, Mohammad, Ghafar-Zadeh, Ebrahim
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Volume:
9
Journal:
Actuators
DOI:
10.3390/act9020024
Date:
March, 2020
File:
PDF, 5.18 MB
2020
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