Wet Chemical Oxidation to Improve Interfacial Properties of...

Energies 2020 / 04 Vol. 13; Iss. 7

Wet Chemical Oxidation to Improve Interfacial Properties of Al2O3/Si and Interface Analysis of Al2O3/SiOx/Si Structure Using Surface Carrier Lifetime Simulation and Capacitance–Voltage Measurement

Min, Kwan Hong, Choi, Sungjin, Jeong, Myeong Sang, Park, Sungeun, Kang, Min Gu, Lee, Jeong In, Kang, Yoonmook, Kim, Donghwan, Lee, Hae-Seok, Song, Hee-eun
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Volume:
13
Journal:
Energies
DOI:
10.3390/en13071803
Date:
April, 2020
File:
PDF, 3.44 MB
2020
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