Infinite Selectivity of Wet SiO2 Etching in Respect to Al

Micromachines 2020 / 03 Vol. 11; Iss. 4

Infinite Selectivity of Wet SiO2 Etching in Respect to Al

Gablech, Imrich, Brodský, Jan, Pekárek, Jan, Neužil, Pavel
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11040365
Date:
March, 2020
File:
PDF, 1.93 MB
2020
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