Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering
Hajihoseini, Hamidreza, Äada, Martin, HubiÄka, Zdenek, Ãnaldi, Selen, Raadu, Michael A., Brenning, Nils, Gudmundsson, Jon Tomas, Lundin, DanielVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5145292
Date:
May, 2020
File:
PDF, 2.72 MB
2020