Factors influencing ion energy distributions in pulsed...

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Journal of Physics D Applied Physics 2020 / 04

Factors influencing ion energy distributions in pulsed inductively coupled argon plasma

Chen, Zhiying, Longo, Roberto, Hummel, Michael, Carruth, Megan, Blakeney, Joel, Ventzek, Peter, Ranjan, Alok
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Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/ab8b08
Date:
April, 2020
File:
PDF, 871 KB
2020
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