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Enhancement of Gas Response of ZnO Micro-nano Structured Films through O2 Plasma Treatment
Nagatomo, Ippei, Uchino, Ryohei, Li, Yanbo, Shuzo, Masaki, Yamada, Ichiro, Delaunay, Jean-JacquesVolume:
129
Year:
2009
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.129.307
File:
PDF, 1.83 MB
2009