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Method of formation of super-smooth optical surfaces using GCIB and ANAB processing
Bakun, A.D., Gusev, A.S., Kargin, N.I., Ryndya, S.M., Siglovaya, N.V.Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.146384
Date:
April, 2020
File:
PDF, 3.19 MB
2020