Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2020 / 05 Vol. 471
Radiation resistance of nanolayered silicon nitride capacitors
Romanova, Marina, Avotina, Liga, Andrulevicius, Mindaugas, Dekhtyar, Yuri, Enichek, Gennady, Kizane, Gunta, Novotný, Michal, Pajuste, Elina, Pokorný, Petr, Yager, Tom, Zaslavski, AleksandrVolume:
471
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2020.03.010
Date:
May, 2020
File:
PDF, 1.42 MB
2020