On the design of piezoelectric MEMS microspeaker for the...

Sensors and Actuators A: Physical 2020 / 05 Vol. 306

On the design of piezoelectric MEMS microspeaker for the sound pressure level enhancement

Cheng, Hsu-Hsiang, Lo, Sung-Cheng, Huang, Zi-Rong, Wang, Yi-Jia, Wu, Mingching, Fang, Weileun
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Volume:
306
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111960
Date:
May, 2020
File:
PDF, 6.74 MB
2020
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