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Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
Hirayama, Masaki, Teramoto, Akinobu, Sugawa, ShigetoshiVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000021
Date:
May, 2020
File:
PDF, 4.08 MB
2020