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Operating pressure influences over micro trenches in exposure time introduced atomic layer deposition
Olotu, Olufunsho Oladipo, Coetzee, Rigardt Alfred Maarten, Olubambi, Peter Apata, Jen, Tien-ChienVolume:
153
Journal:
International Journal of Heat and Mass Transfer
DOI:
10.1016/j.ijheatmasstransfer.2020.119602
Date:
June, 2020
File:
PDF, 5.23 MB
2020