Operating pressure influences over micro trenches in...

International Journal of Heat and Mass Transfer 2020 / 06 Vol. 153

Operating pressure influences over micro trenches in exposure time introduced atomic layer deposition

Olotu, Olufunsho Oladipo, Coetzee, Rigardt Alfred Maarten, Olubambi, Peter Apata, Jen, Tien-Chien
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Volume:
153
Journal:
International Journal of Heat and Mass Transfer
DOI:
10.1016/j.ijheatmasstransfer.2020.119602
Date:
June, 2020
File:
PDF, 5.23 MB
2020
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