Improved electrical characteristics and reliability of...

Solid-State Electronics 2020 / 05 Vol. 167

Improved electrical characteristics and reliability of p-MOSFET with fluorine implant

Lee, Seonhaeng, Yoo, Keon, Ryu, Youngmi, Choi, Yuri, Nam, Kibong, Son, Seunghun, Cha, Seonyong
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Volume:
167
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2020.107783
Date:
May, 2020
File:
PDF, 1.06 MB
2020
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