Comparative study on performance of AlGaN/GaN MS-HEMTs with SiNx, SiOx, and SiNO surface passivation
Cheng, Kai-Yuan, Wu, Shang-Chi, Yu, Chia-Jui, Wang, Tong-Wen, Liao, Jyun-Hao, Wu, Meng-ChyiVolume:
170
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2020.107824
Date:
August, 2020
File:
PDF, 1.27 MB
2020