Graphene-Based Etch Resist for Semiconductor Device...

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ACS Applied Nano Materials 2020 / 05

Graphene-Based Etch Resist for Semiconductor Device Fabrication

Kim, Sang Won, Seol, Minsu, Cho, Yeonchoo, Shin, Keun Wook, Lee, Dongwook, Jeong, Seong-Jun, Lee, Hyangsook, Chung, Jae Gwan, Kim, Hyun-Mi, Kim, Ki-Bum, Park, Seongjun, Shin, Hyeon-Jin
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Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.0c00658
Date:
May, 2020
File:
PDF, 1.94 MB
2020
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