Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances
Kemal, Remzi Erkan, Bozkurt, Ayhan, YaralıoÄlu, Goksen GokseninJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04849-y
Date:
April, 2020
File:
PDF, 706 KB
2020