DC Magnetron-Sputtered Mo Thin Films with High Adhesion, Conductivity and Reflectance
Ahmed, Nisar, Iqbal, Muhammad Azhar, Khan, Zuhair Subhani, Qayyum, Ahmed AbdulJournal:
Journal of Electronic Materials
DOI:
10.1007/s11664-020-08138-2
Date:
April, 2020
File:
PDF, 2.18 MB
2020