Atomic Layer Deposition of GexSe1-x Thin Films for...

ACS Applied Materials & Interfaces 2020 / 04

Atomic Layer Deposition of GexSe1-x Thin Films for Endurable Ovonic Threshold Selectors with a Low Threshold Voltage

Yoo, Chanyoung, Kim, Woohyun, Jeon, Jeong Woo, Park, Eui-Sang, Ha, Manick, Lee, Yoon Kyeung, Hwang, Cheol Seong
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Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.0c03747
Date:
April, 2020
File:
PDF, 3.43 MB
2020
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