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A Study on Uniformity Characteristics of a Magnetized Inductively Coupled Plasma
Hee-Woon Cheong,, Lee, Woohyun, Kim, Ji-Won, Cha, Sujin, Kim, Kyoungji, Lee, HwallyVolume:
46
Journal:
Plasma Physics Reports
DOI:
10.1134/S1063780X20030034
Date:
March, 2020
File:
PDF, 1.39 MB
2020