SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators
Memon, Faisal Ahmed, Qureshi, Imran Ali, Memon, Abdul Latif, Syed, Zafi Sherhan, Pirzada, Nasrullah, Saba, ErumVolume:
10
Journal:
Coatings
DOI:
10.3390/coatings10040309
Date:
March, 2020
File:
PDF, 2.73 MB
2020