An Infrared Chemical Sensor Based on Plasmonic enhanced Bulk Acoustic Wave Resonator Array
Cao, Minghao, Sun, Chongling, Zeng, Guang, Yuan, Yi, Wang, Zhaoxun, Zhang, Menglun, Zhang, Hao, Yang, Qingrui, Pang, WeiYear:
2020
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2020.2986301
File:
PDF, 1.50 MB
2020