Development of micromachined flow sensor for drip infusion...

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Microsystem Technologies 2020 / 4

Development of micromachined flow sensor for drip infusion system

Shimohira, Chihiro, Hasegawa, Yoshihiro, Taniguchi, Kazuhiro, Matsushima, Miyoko, Kawabe, Tsutomu, Shikida, Mitsuhiro
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04839-0
Date:
April, 2020
File:
PDF, 916 KB
2020
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