Interfacial hydrogen incorporation in epitaxial silicon for layer transfer
An, Junyang, Zheng, Zhen, Gong, Ruiling, Nguyen, Thi Bao Tran, Jun, Haeyeon, Chrostowki, Marta, Maurice, Jean-Luc, Chen, Wanghua, Roca i Cabarrocas, PereVolume:
518
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.146057
Date:
July, 2020
File:
PDF, 6.81 MB
2020