On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator
A. Corigliano, L. Domenella, G. LangfelderVolume:
50
Language:
english
Pages:
13
DOI:
10.1007/s11340-009-9266-1
Date:
July, 2010
File:
PDF, 1.24 MB
english, 2010