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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
Obitani, Kazutaka, Tsuchiya, Toshiyuki, Araya, Kazutaka, Yachi, MasanoriYear:
2020
DOI:
10.1109/MEMS46641.2020.9056282
File:
PDF, 1.18 MB
2020