Laser Induced Stress Wave Thermometry forIn-situTemperature and Thickness Characterization of Single Crystalline Silicon Wafer: Part I—Theory and Apparatus
V. Vedantham, C. S. Suh, R. ChonaVolume:
51
Language:
english
Pages:
12
DOI:
10.1007/s11340-010-9413-8
Date:
September, 2011
File:
PDF, 2.57 MB
english, 2011