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Nanolaminated Al 2 O 3 /HfO 2 dielectrics for silicon carbide based devices
Lo Nigro, Raffaella, Schilirò, Emanuela, Fiorenza, Patrick, Roccaforte, FabrizioVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5134662
Date:
May, 2020
File:
PDF, 1.88 MB
2020