Improved thin film growth using Slow Kinetics Intermittent...

Applied Surface Science 2020 / 06 Vol. 516

Improved thin film growth using Slow Kinetics Intermittent Sputtering

Weymann, Christian, Lichtensteiger, Céline, Fernandez-Peña, Stéphanie, Cordero-Edwards, Kumara, Paruch, Patrycja
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Volume:
516
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.146077
Date:
June, 2020
File:
PDF, 2.80 MB
2020
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