Fabrication of millimeter-long structures in sapphire using...

Optics and Lasers in Engineering 2020 / 10 Vol. 133

Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching

Capuano, L., Tiggelaar, R.M., Berenschot, J.W., Gardeniers, J.G.E., Römer, G.R.B.E.
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Volume:
133
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2020.106114
Date:
October, 2020
File:
PDF, 6.09 MB
2020
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