Metrology of crystal defects through intensity variations...

Ultramicroscopy 2020 / 06 Vol. 213

Metrology of crystal defects through intensity variations in secondary electrons from the diffraction of primary electrons in a scanning electron microscope

Naresh-Kumar, G., Alasmari, A., Kusch, G., Edwards, P.R., Martin, R.W., Mingard, K.P., Trager-Cowan, C.
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Volume:
213
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2020.112977
Date:
June, 2020
File:
PDF, 4.23 MB
2020
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