Performance Improvement by Blanket Boron Implant in the...

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Performance Improvement by Blanket Boron Implant in the Sigma-shaped Trench before the Embedded SiGe Source/Drain Formation for 28-nm PMOSFET

Li, Zhong-Hua, Li, Run-Ling, Jiang, Yu-Long, Zhang, Yan-Wei, Cao, Yong-Feng, Wang, Xue-Jiao
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Year:
2020
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2020.2985740
File:
PDF, 547 KB
2020
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