Extension of CD-TEM towards 3D Elemental Mapping

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Extension of CD-TEM towards 3D Elemental Mapping

Baumann, Frieder H., Popielarski, Brian, Lu, Yinggang, Mitchell, Travis
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Year:
2020
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2020.2990588
File:
PDF, 690 KB
2020
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