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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Mechanical characterization of microgrippers realized by LIGA technique

Basrour, S., Robert, L., Ballandras, S., Hauden, D.
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Volume:
1
Year:
1997
DOI:
10.1109/sensor.1997.613722
File:
PDF, 442 KB
1997
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