Growth-induced temperature changes during transition metal...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 05 Vol. 38; Iss. 3

Growth-induced temperature changes during transition metal nitride epitaxy on transparent SiC substrates

Scott Katzer, Douglas, Hardy, Matthew T., Nepal, Neeraj, Downey, Brian P., Jin, Eric N., Meyer, David J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000063
Date:
May, 2020
File:
PDF, 1.93 MB
2020
Conversion to is in progress
Conversion to is failed