Density Functional Theory Study of Oxygen Adsorption on...

  • Main
  • 2020 / 05
  • Density Functional Theory Study of Oxygen Adsorption on...
ACS Applied Nano Materials 2020 / 05

Density Functional Theory Study of Oxygen Adsorption on Polymer Surfaces for Atomic Layer Etching: Implications for Semiconductor Device Fabrication

Longo, Roberto C., Ranjan, Alok, Ventzek, Peter L. G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.0c00618
Date:
May, 2020
File:
PDF, 15.86 MB
2020
Conversion to is in progress
Conversion to is failed