Prediction of midfrequency sputtering cathode erosion position with vertical magnetic field
He, Yun-peng, Bi, Shi-bo, Yin, Ji-ping, Lv, Shao-bo, Wang, Rui-sheng, Lin, ZengJournal:
Surface Engineering
DOI:
10.1080/02670844.2020.1747752
Date:
April, 2020
File:
PDF, 3.18 MB
2020