Silicon negative ion implantation induced vacancy defects...

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Radiation Effects and Defects in Solids 2020 / 05

Silicon negative ion implantation induced vacancy defects in thermally grown SiO 2 thin films

Vishwakarma, S. B., Dubey, S. K., Dubey, R. L., Yadav, A., Jadhav, V., Bambole, V., Sulania, I., Kanjilal, D., Devi, K. Devarani
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Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420150.2020.1756812
Date:
May, 2020
File:
PDF, 1.35 MB
2020
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