A comparison of cavities and extended defects formed in helium-implanted 6H-SiC at room temperature and 750â
Liao, Qing, Li, Bingsheng, Kang, Long, Li, XiaogangJournal:
Chinese Physics B
DOI:
10.1088/1674-1056/ab8abc
Date:
April, 2020
File:
PDF, 1.64 MB
2020